- * Provide SECS/GEM function and capabilities, compatible with and HSMS .
- * Map Marking.
- * Dynamic data Marking.
- * Sequential data Marking.
- * Wafer ID.
- * End Pumping Diode Laser.
- * Marking FOV. 300x300mm.
- * Marking accuracy : X/Y: ±75um ；Theta: ±0.015degre . <1Hr.
ILM-300WB
 |
張欽華 |
T:886-2-22682216 #2001 |
| 規格 | |
|---|---|
|
Marking FOV |
200x200mm |
|
Marking Accuracy |
X/Y: ±75um ；Theta: ±0.015degre |
|
Minimum Character |
125um (base on 25um spot size) |
|
Marking Speed |
>800k characters/hour at 30um spot size |
|
|
